|
Genamics JournalSeek
Journal of Vacuum Science & Technology B
J Vac Sci Tech B
ISSN (printed): 2166-2746. ISSN (electronic): 2166-2754.
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
- Further information
-
- Category Link
| 
