Return to JournalSeek Home

Genamics JournalSeek

Journal of Vacuum Science & Technology B
J Vac Sci Tech B

Published/Hosted by AVS (American Vacuum Society). ISSN (printed): 2166-2746. ISSN (electronic): 2166-2754.

Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

   Further information
   Category Link








Add To Favorites
Email This Page



Side Panel
Privacy Policy About Us Contact Us