Journal of Vacuum Science & Technology B
J Vac Sci Tech B
Published/Hosted by AVS (American Vacuum Society).
ISSN (printed): 2166-2746. ISSN (electronic): 2166-2754.
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
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