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Journal of Microlithography, Microfabrication, and Microsystems, The

Published/Hosted by The International Society for Optical Engineering. ISSN: 1537-1646.

Discontinued in 2007. Continued by the Journal of Micro/Nanolithography, MEMS, and MOEMS (1932-5150). The Journal of Microlithography, Microfabrication, and Microsystems (JM3) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the future needs of the electronics, micro-opto-electro-mechanical (MEMS and MOEMS), and photonics industries. The scope is broad, to facilitate synergy and interest between the communities served by the journal.

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