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Journal of Micromechanics and Microengineering

ISSN (printed): 0960-1317. ISSN (electronic): 1361-6439.

Journal of Micromechanics and Microengineering covers all aspects of microelectromechanical structures, devices and systems, as well as micromechanics and micromechatronics. The journal aims to highlight the link between fabrication technologies and their capacity to create novel devices. The journal focuses on fundamental work in fabrication and process technologies, including bulk and surface micromachining, LIGA, EDM, bonding, lithography, and focussed ion beam techniques. New aspects of production techniques to create micromechanical systems and reliability aspects are reported. Applications of these techniques in sensor and actuator areas are covered. Typical devices include accelerometers, displays, resonators, micromotors, microvalves and pumps, micropositioners, microrobots, micro-optical systems and MEMS for RF applications. Methods to improve the achievable results are reported, such as CAD and modelling tools to predict the performance of micromechanical systems, and metrology to evaluate their performance. The journal also covers interface electronics and integration and vacuum microelectronics.

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